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03/25/2023
GPU-accelerated Matrix Cover Algorithm for Multiple Patterning Layout Decomposition
Multiple patterning lithography (MPL) is regarded as one of the most pro...
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03/18/2023
DevelSet: Deep Neural Level Set for Instant Mask Optimization
With the feature size continuously shrinking in advanced technology node...
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03/15/2023
Physics-Informed Optical Kernel Regression Using Complex-valued Neural Fields
Lithography is fundamental to integrated circuit fabrication, necessitat...
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