research
∙
05/04/2023
Impact Study of Numerical Discretization Accuracy on Parameter Reconstructions and Model Parameter Distributions
Numerical models are used widely for parameter reconstructions in the fi...
share
research
∙
02/23/2022
Bayesian Target-Vector Optimization for Efficient Parameter Reconstruction
Parameter reconstructions are indispensable in metrology. Here, on wants...
research
∙
07/12/2021
Recent advances in Bayesian optimization with applications to parameter reconstruction in optical nano-metrology
Parameter reconstruction is a common problem in optical nano metrology. ...
research
∙
01/08/2021
Bayesian optimization with improved scalability and derivative information for efficient design of nanophotonic structures
We propose the combination of forward shape derivatives and the use of a...
research
∙
03/28/2019
Using Gaussian process regression for efficient parameter reconstruction
Optical scatterometry is a method to measure the size and shape of perio...
research
∙
09/18/2018